FEI Nova 400 Nano SEM



The Nova 400 is a high resolution field emission SEM with through-the-lens differential pumping for low vacuum imaging capabilities.

Specifications:

Resolution @ optimum WD (high vacuum)

1.0 nm @ 15 kV (TLD-SE)

1.8 nm @ 1 kV (TLD-SE)
 

Resolution @ optimum WD (low vacuum)

1.5 nm @ 10 kV (Helix)

1.8 nm @ 3 kV (Helix)
 

Accelerating voltage: 200V - 30kV

Probe current: 0.3 pA - 22 nA continuously adjustable

Maximum horizontal field width: 3.9 mm @ 5 mm WD
 

Detectors:

In-lens SE detector (TLD-SE)

In-lens BSE detector (TLD-BSE)

Everhardt-Thornley SED

Low vacuum SED (LVD)

IR-CCD

UHR low vacuum SED (Helix)

TV-rate solid-state BSED

TV-rate low vacuum solid-state BSED (GAD)

STEM detector