Cressington HR208 Sputter Coater Protocol

Cressington  HR208 sputter coater

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  1. Open the regulator valve to Ar tank
  2. Lift lid
  3. Remove bell jar
  4. Rotate black knurled knob to move stage to desired platform; insert stubs on stage N.B. Any sample hanging off perimeter of stage will hit thickness monitor
  5. Replace bell jar
  6. Center shutter
  7. Replace lid
  8. Power to ON
  9. Wait until turbo reaches proper speed (READY light illuminates) and vacuum reaches 0.01 mbar; Press LEAK, wait 2 seconds or until leak circuit is purged then press LEAK again to turn OFF
  10. Turn ON thickness monitor
  11. Pump 10 – 15 minutes
  12. Press FLUSH; wait 10 -15 seconds and note vacuum degrades and press FLUSH again; once vacuum recovers REPEAT
  13. To check thickness, press and hold the TERMINATOR button; to set press up/down arrows
  14. Lightly press TERMINATOR button to arm (light is illuminated)
  15. Open shutter; do NOT rest on glass
  16. Start stage rotation by turning black knurled knob 2 clicks
  17. Start leak and thickness monitor; press FLUSH, wait 2 seconds then press LEAK; once vacuum reaches 0.02 mbar press ZERO
  18. Press START/STOP button; note monitor counts up to pre-set thickness (Pt/Pd set at 40 mA for approximately 1.5 minutes
  19. Once coating is finished press LEAK
  20. Stop the stage rotation
  21. Power to OFF
    Turn OFF MTM
  22. Close regulator valve to Ar tank
  23. Close shutter
  24. Lift lid
  25. Remove bell jar
  26. Remove samples
  27. Replace bell jar
  28. Replace lid

 

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